X-axis

Travel range

±15 mm

Mechanical resolution

0.9 µm/°

Y-axis

Travel range

±10 mm

Mechanical resolution

0.9 µm/°

Yaw (Θ_y)

±6°

Pitch (Θ_x)

±3°

Outer mounting diameter

diameter 160 mm

Optical aperture

diameter 142 mm

Off-plane height

204 mm